Semiconductor
Precision measuring instruments, granite bases and ceramic components: the foundation for excellence in the semiconductor industry
In the semiconductor industry, an extremely high level of accuracy and precision is essential for all processes, from lithography to deposition, from etching to packaging.
To achieve and maintain high quality standards, ultra-high-precision measuring and positioning instruments are integrated with granite bases and ceramic components in order to guarantee accuracy, precision and stability, as well as an excellent level of vibration damping. In particular, ceramic components are suitable for the extreme purity requirements needed to prevent contamination of products and cleanrooms.
Quality control and stability in microelectronic processes
Undoubtedly, the market that has experienced the greatest expansion in recent years is the semiconductor market. Thanks to process innovation, the upgrading of machinery to the highest quality standards and company know-how, the Microplan® Group supplies leading companies in the semiconductor sector: in addition to structures, small-, medium- and large-size bases and ceramic components with precision micromachining, Microplan offers the Customer a complete precision assembly service for linear guides, linear motors, measuring scales, mechanical components, etc.
Some examples of applications for the semiconductor sector are listed below:
- ceramic components for silicon wafer handling, alumina and SiC end effectors and chucks
- natural granite and ceramic XY stages for different silicon wafer production processes
- natural granite structures for optical lithography machines
Applications in the semiconductor sector
Microplan solutions are used in:
Support bases for wafer inspection and in-line metrology
Banchi antivibranti per microscopi elettronici (SEM, TEM) e AFM
Reference plates for calibration of sensors and actuators
Bases for electrical and optical testing of microchips and MEMS devices
Projects for the Semiconductor Sector
